Advanced Nanofabrication Multiple Testing

Project Description

MULTIPLE SAMPLES, MULTIPLE TESTING
LABORATORY OUTSIDE OF USA AND CANADA
LONG TERM TESTING
SMALL LABORATORY PREFERRED
APPROVED BUDGET

Briefly, the sample is represented by an array of conductive GaAs nanowires grown on a conductive
n+ GaAs substrate. The method of growing, at this step, we do not specify and leave it to your
convenience, as long as nanowires are conductive. The nanowire parameters and positions do not
have to be strictly regular, however, we are targeting specific values for nanowire density, nanowire
height, and width. Please let us know if you have limitations concerning any of the specified
parameters (particularly: nanowire density and nanowire height)
Sample Manufacturing section
1. Chemical hood for substrate chemical preparation
2. III-V MBE with RF-plasma nitrogen cell and various effusion cell and
dopant cells
3. E-beam metal evaporator. Optionally, can be replaced by a thermal
evaporator installed in a transfer model of the MBE machine
4. Si deposition equipment:
a. CVD-PECVD with SiH4 gas line
b. HW-CVD
c. CVI (Chemical Vapor Infiltration)
d. Spreycoating with Si nanoparticle suspension
5. ALD
6. Metal evaporator (e-beam or sputtering)
7. Optical photolithography equipment
8. Electrodeposition equipment
9. Sample storage
Sample Testing section
1. High-quality SEM (Hitachi SU8000, FEI Magellan, Thermofisher Verios
or analogous) equipped with electrical analyzer (such as Kleindiek
probe shuttle for local I-V measurements) and micro-manipulators (for
testing mechanical properties).
2. Characterization tools:
a. I-V probe station,
b. C-V measurements,
c. chemical benches (for electrolyte-related testing)
3. Optical microscope
4. analytical tools for material characterization
a. X-ray diffraction,
b. EDX module in SEM
5. Nanoind